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本期期刊

8 5 月, 2018
Yield Management Solutions Digital Magazine Yield Management Solutions Digital Magazine
Also available in:
  • English
  • Simplified Chinese (簡體中文)
  • 製程管控中的先進課題

    繼上一期探討製程管控中的10個基本事實之後,本期的Process Watch系列文章將著重介紹製程管控的其他趨勢,其中包括成功的實施策略及其為IC製造帶來的優勢。通過了解製程管控的本質,代工廠可以更好地實施策略,以識別關鍵缺陷、發現偏移並減少變異來源。
    這些文章涉及不同的課題:代工廠所發現的減少環境影響的方式;在製程管控中增加的用以縮短製程週期的非直觀步驟;檢測和糾正微小製程偏移的成本效益;將在線量測/檢測結果與EOL產量相關聯;以及計算需要收集多少檢測資料可以確定新製程是否可以減少微粒數量。

    這些Process Watch的系列文章最初發表於Solid State Technology。

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    Tags:
    • T-測試
    • 回擊分析
    • 基線產量
    • 採樣
    • 故障分析
    • 製程偏移
    • 製程管控
    • 週期

    2017年11月21日期刊

    21 11 月, 2017
    Yield Management Solutions Digital Magazine Yield Management Solutions Digital Magazine
    Also available in:
  • English
  • Simplified Chinese (簡體中文)
  • 集成電路工業過程控制的十大基礎

    過程控制基礎

    本文是就半導體產業製程控制(檢測與量測)的根本法則進行討論的十集系列連載中的第一集。 所謂根本,我們的意思是指它們:

    • 毋庸置疑: 它們不證自明,從第一原理就能證明,或者世界各地晶圓廠占主導地位的行為 予以佐證。
    • 恒定不變: 這些概念如同 15 年前適用於 0.25μm 那樣,對於現今的 28nm 同樣適用,並且 預期未來仍將有效。
    • 普遍適用: 它們並非只對於某個特定區段的製程控制適用,而是適用於整體的製程控制, 又適用於晶圓廠內每個單獨的製程控制部分。
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    Tags:
    • 度量衡學
    • 採樣
    • 檢查
    • 產量
    • 短途旅行
    • 缺陷
    • 製程管控
    • 設備可靠性
    • 變化性
    • 週期
    • 主頁
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