Articles about 'Lithography Defects'

Summer Issue 2012

12 June, 2012

Introducing the Surfscan SP3 450

The Surfscan® SP3 450 is the first of KLA’s process control systems capable of handling and inspecting 450mm wafers. As a new configuration of the market-leading Surfscan SP3 platform, these fully-automated unpatterned wafer inspection systems feature unique deep ultra-violet (DUV) sensitivity and unique high-resolution SURFmonitorTM surface quality characterization to support sub-20nm node requirements. The Surfscan SP3 450 enables manufacturing process control for 450mm polished silicon and epitaxial silicon substrates and also delivers critical capability for manufacturers of 450mm process equipment, such as wet clean tools, CMP pads, slurries and polishers, film deposition tools and annealing systems.

Summer Issue 2002

9 July, 2002

Summer 2002 Volume 4, Issue 2

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Fall Issue 2001

18 September, 2001

Fall 2001 Volume 3, Issue 3

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Summer Issue 2000

10 July, 2000
Summer 2000 Volume 2, Issue 3

 

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Fall Issue 1998

10 August, 1998

Fall Vol1

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Stay Updated

Subscribe to stay in the know - We'll send periodic email updates.

Sign Up Now