Introducing the Surfscan SP3 450

The Surfscan^® SP3 450 is the first of KLA’s process control systems capable of handling and inspecting 450mm wafers. As a new configuration of the market-leading Surfscan SP3 platform, these fully-automated unpatterned wafer inspection systems feature unique deep ultra-violet (DUV) sensitivity and unique high-resolution SURFmonitor^TM surface quality characterization to support sub-20nm node requirements. The Surfscan SP3 450 enables manufacturing process control for 450mm polished silicon and epitaxial silicon substrates and also delivers critical capability for manufacturers of 450mm process equipment, such as wet clean tools, CMP pads, slurries and polishers, film deposition tools and annealing systems.

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.