Spring Issue 20188 May, 2018
ADVANCED TOPICS IN PROCESS CONTROL
Following a previous issue that explored the 10 fundamental truths of process control, this series of Process Watch articles highlights additional trends in process control, including successful implementation strategies and the benefits for IC manufacturing. By understanding the fundamental nature of process control, fabs can better implement strategies to identify critical defects, find excursions, and reduce sources of variation. These articles touch upon a variety of topics: the ways fabs have found to reduce their environmental impact; the non-intuitive idea that adding process control steps can reduce process cycle time; the cost-effectiveness of detecting and correcting small process excursions; correlating inline metrology/inspection results to EOL yield; and calculating how much inspection data needs to be collected to determine whether or not a new process reduces particle count.