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Articles about 'Lithography Defects'

Fall Issue 1998

10 August, 1998 Fall Vol1

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Fall Issue 2001

18 September, 2001 Fall 2001 Volume 3, Issue 3

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Summer Issue 2000

10 July, 2000
Summer 2000 Volume 2, Issue 3

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Summer Issue 2002

09 July, 2002 Summer 2002 Volume 4, Issue 2

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Summer Issue 2012

12 June, 2012

Introducing the Surfscan SP3 450

The Surfscan® SP3 450 is the first of KLA-Tencor’s process control systems capable of handling and inspecting 450mm wafers. As a new configuration of the market-leading Surfscan SP3 platform, these fully-automated unpatterned wafer inspection systems feature unique deep ultra-violet (DUV) sensitivity and unique high-resolution SURFmonitorTM surface quality characterization to support sub-20nm node requirements. The Surfscan SP3 450 enables manufacturing process control for 450mm polished silicon and epitaxial silicon substrates and also delivers critical capability for manufacturers of 450mm process equipment, such as wet clean tools, CMP pads, slurries and polishers, film deposition tools and annealing systems.

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