Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine Unpatterned Wafer Inspection - YMS Magazine

Articles about 'Unpatterned Wafer Inspection'

Spring Issue 2007

02 April, 2007 Spring 2007 Volume 9, Issue 1

Preview the interactive digital publishing of YMS Magazine to simulate the experience of reading a print publication online.

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Spring Issue 2013

21 March, 2013

PRODUCT SPOTLIGHT: SensArray

KLA-Tencor's SensArray wafers provide a unique way -- not available through other means -- to monitor the effect of the process environment on semiconductor production wafers. Measurements are used by chipmakers and process equipment manufacturers to optimize and control their processes and process tools.

Process and equipment engineers alike utilize SensArray wafers throughout the fab for thermal information as an indicator of manufacturing equipment performance. With more advanced semiconductor manufacturing technologies -- such as smaller design rules, new materials, and new structures -- temperature control is becoming more critical.

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Summer Issue 2004

09 August, 2004 Summer 2004 Volume 6, Issue 2

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Summer Issue 2012

12 June, 2012

Introducing the Surfscan SP3 450

The Surfscan® SP3 450 is the first of KLA-Tencor’s process control systems capable of handling and inspecting 450mm wafers. As a new configuration of the market-leading Surfscan SP3 platform, these fully-automated unpatterned wafer inspection systems feature unique deep ultra-violet (DUV) sensitivity and unique high-resolution SURFmonitorTM surface quality characterization to support sub-20nm node requirements. The Surfscan SP3 450 enables manufacturing process control for 450mm polished silicon and epitaxial silicon substrates and also delivers critical capability for manufacturers of 450mm process equipment, such as wet clean tools, CMP pads, slurries and polishers, film deposition tools and annealing systems.

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