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Winter Issue 2014

09 January, 2014

PRODUCT SPOTLIGHT: Broadband Plasma Defect Inspection

Advanced defect detection, metrology, and review systems are utilized by IC manufacturers to ramp new processes, increase yield and ultimately increase profitability. KLA-Tencor’s unique broadband plasma inspectors offer the most capable technology for discovering all of the yield-critical defect types on leading-edge devices.

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