High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine High K Metal Gate - YMS Magazine

Articles about 'High K Metal Gate'

Summer Issue 2011

12 July, 2011

SPOTLIGHT: 2011 Lithography Users’ Forum Keynote Presentation

Coinciding with the 2011 SPIE Advanced Lithography exhibition, KLA-Tencor hosted its one-of-a-kind Lithography Users' Forum (LUF). Annually, this event brings together the industry’s leading lithographers for networking, information sharing, and discussions surrounding challenges facing the industry and possible solutions.

Tags:

Winter Issue 2015

22 January, 2015

WAFER METROLOGY

Addressing Thin Film Thickness Metrology Challenges of 14nm BEOL Layers

This paper describes a method to effectively monitor the film stack at different metal CMP process steps using a spectroscopic ellipsometer metrology tool. By proper modeling of the Cu dispersion and simulating the underlayer film information underneath the Cu pad, a single measurement recipe was developed which can be used to monitor each process step in the metal CMP process with stable and reliable results.

Tags:

Stay Updated

Subscribe to stay in the know - We'll send periodic email updates.