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Articles about 'Process Control'

Current Issue

02 November, 2017
Process Control - YMS MagazineProcess Control - YMS Magazine

FUNDAMENTALS OF PROCESS CONTROL

This is the introduction to a series of 10 installments which will discuss fundamental truths about process control—inspection and metrology—for the semiconductor industry.
By fundamental, we imply the following:

  • Unassailable: They are self-evident, can be proven from first principles, or are supported by the dominant behavior at fabs worldwide
  • Unchanging: These concepts are equally true today for 28nm as they were 15 years ago for 0.25μm, and are expected to hold true in the future
  • Universal: They are not unique to a specific segment of process control; rather they apply to process control as a group, as well as to each individual component of process control within the fab
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Spring Issue 2001

09 April, 2001 Spring 2001 Volume 3, Issue 2

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Spring Issue 2011

01 March, 2011

SPOTLIGHT: LED Manufacturing

LEDs are quickly transforming the lighting industry. High Brightness LED (“HB-LED”) usage is increasing for new applications as manufacturing costs decrease and performance improves. Applications such as mobile phone LCD screens and keypads and flashlights for camera phones have been the drivers for market growth in the last couple of years, as well as car headlights, LCD TV backlights and traffic signaling. HB-LED’s typically are used for high-end applications, making quality control imperative.

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Summer Issue 2000

10 July, 2000
Summer 2000 Volume 2, Issue 3

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Summer Issue 2002

09 July, 2002 Summer 2002 Volume 4, Issue 2

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Summer Issue 2004

09 August, 2004 Summer 2004 Volume 6, Issue 2

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Summer Issue 2011

12 July, 2011

SPOTLIGHT: 2011 Lithography Users’ Forum Keynote Presentation

Coinciding with the 2011 SPIE Advanced Lithography exhibition, KLA-Tencor hosted its one-of-a-kind Lithography Users' Forum (LUF). Annually, this event brings together the industry’s leading lithographers for networking, information sharing, and discussions surrounding challenges facing the industry and possible solutions.

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Summer Issue 2015

01 July, 2015

PRODUCT SPOTLIGHT: Overlay and Film Metrology Systems for 5D Patterning Control Solution

KLA-Tencor is driving improved patterning by addressing five elements of patterning control ─ the three geometrical dimensions of device structures, time-to-results and overall equipment efficiency. The Archer 500LCM overlay metrology system offers a wide range of measurement options and supports a range of overlay measurement target designs. The SpectraFilm LD10’s laser-driven plasma light source produces reliable, high-precision film measurements for a broad range of film layers.

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