MEMORY
Digging Deep into High Aspect Ratio Process Control for Memory Technology
Data is an integral part of our lives. Contrary to the past, where files had to be removed periodically to free up storage space, we now assume that our data will never be deleted. Why risk deleting the wrong file? Just keep them! This new approach consumes a lot of memory, and intensifies the demand for storage. Two of the main workhorses of the memory segment are NAND flash and DRAM. DRAM is dynamic, volatile and very fast, making it well suited for short term system memory. Conversely, NAND flash is non-volatile, which means it has good retention and can function well for long term low-cost storage. Higher speed, higher density and lower bit cost have been the main goals for both of these memory types as demand continues to increase.
ARTICLES
- Editorial: Digging Deep into High Aspect Ratio Process Control for Memory Technology
- Criticality of Wafer Edge Inspection and Metrology Data to All-Surface Defectivity Root Cause and Yield Analysis
- Clean Focus, Dose and CD Metrology for CD Uniformity Improvement
- Accuracy Optimization with Wavelength Tunability in Overlay Imaging Technology
- In Cell Overlay Metrology by Using Optical Metrology Tool
- Spectral Tunability for Accuracy, Robustness, and Resilience
