HOTSPOT DISCOVERY AND CONTROL
Hotspot Management: Process Window Discovery and Control
With advanced patterning techniques and shrinking design nodes come the proliferation of hotspots, and complex correlations between hotspots and increasingly narrow process margins. Additionally we see a change in the causes of hotspots; design systematics related to layout or OPC no longer dominate as the primary source of hotspots. We are seeing an increasing effect from process systematics, which are related to design but are induced by process related sources (wafer non-uniformity, process variations), or, in case of multi-patterning schemes, also by interactions between the different masks. These hotspot complexities are driving the need for process window discovery, expansion and control.
HOTSPOT DISCOVERY AND CONTROL
Hotspot Management: Process Window Discovery and Control
With advanced patterning techniques and shrinking design nodes come the proliferation of hotspots, and complex correlations between hotspots and increasingly narrow process margins. Additionally we see a change in the causes of hotspots; design systematics related to layout or OPC no longer dominate as the primary source of hotspots. We are seeing an increasing effect from process systematics, which are related to design but are induced by process related sources (wafer non-uniformity, process variations), or, in case of multi-patterning schemes, also by interactions between the different masks. These hotspot complexities are driving the need for process window discovery, expansion and control.
ADDITIONAL ARTICLES
- Process Window Discovery, Expansion and Control of Design Hotspots Susceptible to Overlay Failures
- Process Window Discovery Methodology Development for Advanced Lithography
- Understanding Process and Design Systematics: Case Study on Monitoring Strategy and Understanding Root Cause of Fin Defectivity
- Nontraditional Post Develop Inspection and Review Strategy for Via Defects
- Connected Component Analysis of Review-SEM Images for Sub-10 nm Node Process Verification
- Innovative Scalable Design Based Care Area Methodology for Defect Monitoring in Production
